I am not au fait with your engine but does it have a cam chain or cambelt ?
Depends what sort of vibration it is - a couple of times I had quite horrendous sounding noises coming from heat shields - once it was a steering rack heat shield which had been bent out of shape by a garage whilst doing a job on the car.
The most recent one was the heavy duty heat shield on the catalytic converter (2005 Grand Vitara original Jap shield so quite heavy metal shields).
Another possibility might be exhaust rubbing or exhaust heat shield but heat shield noises would probably also be audible at the resonant frequency whilst driving.